Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator
نویسندگان
چکیده
منابع مشابه
Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator
This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate the motion of the fishbo...
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ژورنال
عنوان ژورنال: The Scientific World Journal
سال: 2014
ISSN: 2356-6140,1537-744X
DOI: 10.1155/2014/912683